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MAV Design Aspects Using MEMS

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Fig. 11.5 Processing steps to design bio-mimicking insects (Dimensions are not quoted for various

reasons)

• Dry processing of MEMS needs to improve yield of MEMS production; and

• A detailed addressing of packaging problems of MEMS needs to be incorporated.

Summary

MEMS for MAV are open challenge for Semiconductors Technology to realize the

working MAV. The MAV has to be designed according to MEMS process capabilities.

A systematic approach is needed to identify various components such as mechanical

parts for flying, sensors, communication systems etc. Process Compatible electronic

materials should be identified, and the unit process has to be optimised for mechan-

ical parts by designing a PEV. Similarly the sensor devices and communication